논문
논문 기본정보
자성체 피복형 연마입자를 이용한 유리의 평면 래핑의 기초 연구
| 기관명 | NDSL |
|---|---|
| 저널명 | 한국기계가공학회지 = Journal of the Korean Society of Manufacturing Technology |
| ISSN | 1598-6721,2288-0771 |
| ISBN |
논문 개요
| 저자(한글) | |
|---|---|
| 저자(영문) | |
| 소속기관 | |
| 소속기관(영문) | |
| 출판인 | |
| 간행물 번호 | |
| 빌행연도 | 2011-01-01 |
| 초록 | In order to obtain excellent flatness and surface roughness of glass substrate disk, uniform distribution of abrasives should be important for uniform polishing. We introduced coated-type magnetic abrasives and magnetic field to a lapping for the improvement of surface roughness and removal rate. Polishing properties with the conventional diamond abrasives and the coated-type magnetic abrasives were compared. As a result, the coated-type magnetic abrasives showed small surface roughness and large removal rate by applying magnetic field. And it also was shown that coated-type magnetic abrasives could save the more amount of polishing liquid under the same removal rate than the conventional diamond abrasives can. |
| 원문URL | http://click.ndsl.kr/servlet/OpenAPIDetailView?keyValue=03553784&target=NART&cn=NART69848084 |
| 첨부파일 |
추가정보
| 과학기술표준분류 | |
|---|---|
| ICT 기술분류 | |
| DDC 분류 | |
| 주제어 (키워드) | Polishing of Glass Plates(유리평면 연마) Coated-Type Magnetic Abrasives(자성체 피복형 연마입자) Removal Rate(연마율) Surface Roughness(표면거칠기) Abrasives(연마재) |