논문
논문 기본정보
전자빔 표면조사에 따른 SnO2 박막의 전기적, 광학적 특성 연구
| 기관명 | NDSL |
|---|---|
| 저널명 | 열처리공학회지 = Journal of the Korean society for heat treatment |
| ISSN | 1225-1070, |
| ISBN |
논문 개요
| 저자(한글) | 송영환,문현주,김대일 |
|---|---|
| 저자(영문) | |
| 소속기관 | |
| 소속기관(영문) | |
| 출판인 | |
| 간행물 번호 | |
| 빌행연도 | 2016-01-01 |
| 초록 | We have considered the influence of electron irradiation on the optical and electrical properties of $SnO_2$ thin films deposited with reactive RF magnetron sputtering. After deposition, the films electron irradiated at 300 eV shows a lower sheet resistance of $277{ Omega}/{ square}$ and the optical transmittance in a visible wave length region also influenced with the electron irradiation energy. The film that electron irradiated at 400 eV shows a higher optical transmittance of 82.6% in this study. By comparison of figure of merit, it is concluded that the post-deposition electron irradiation at 300 eV is the optimum condition for the enhancement of opto-electrcal performance of $SnO_2$ thin film in this study. |
| 원문URL | http://click.ndsl.kr/servlet/OpenAPIDetailView?keyValue=03553784&target=NART&cn=JAKO201620853200812 |
| 첨부파일 |
추가정보
| 과학기술표준분류 | |
|---|---|
| ICT 기술분류 | |
| DDC 분류 | |
| 주제어 (키워드) | lt TEX gt $SnO_2$ lt /TEX gt . Thin film Magentron sputtering Electron irradiation Figure of merit |